GROWTH
- Metal-organic vapor phase epitaxy (MOVPE)
– two reactors (one 1×2″ and one 3×2″/1×4″)
- Ammonia and plasma molecular beam
epitaxy (MBE)
- Hydride vapor phase epitaxy (HVPE)
CHARACTERIZATION
- High resolution X-ray diffraction (HRXRD)
- Atomic force microscopy (AFM)
- Scanning electron microscopy (SEM)
- Photoluminescence (PL)
- Micro-photoluminescence (µ-PL)
- Time-resolved photoluminescence (TRPL)
- Electroluminescence (EL)
- (Time-resolved) Cathodoluminescence (CL)
- Reflectivity
- Photoreflectance
- Integrating sphere
- Hall effect
- Electrochemical C-V
- Second-order correlation function measurements
- Micro-Raman spectroscopy
- Hakki-Paoli and variable stripe length gain measurements
PROCESSING
- E-beam & Optical lithography
- Wet etching
- Reactive-ion etching
- Plasma etching
- Electron-beam evaporators
- Plasma-enhanced chemical-vapor deposition (PECVD)
- Wet thermal oxidation
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